Polymer-assisted aqueous deposition of metal oxide films
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United States of America Patent
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Jul 8, 2003
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N/A
app pub date -
Jul 31, 2000
filing date -
Jul 31, 2000
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Expired
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Abstract
An organic solvent-free process for deposition of metal oxide thin films is presented. The process includes aqueous solutions of necessary metal precursors and an aqueous solution of a water-soluble polymer. After a coating operation, the resultant coating is fired at high temperatures to yield optical quality metal oxide thin films.
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