Multilayer antireflection film, optical member, and reduction projection exposure apparatus
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United States of America Patent
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Jul 8, 2003
Issued Date -
N/A
app pub date -
Oct 10, 2000
filing date -
Mar 29, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A multilayer antireflection film comprises a laminate consisting of an alternate stack of at least one low-refractive-index layer and at least one high-refractive-index layer, at least one of outermost layers in the laminate is a low-refractive-index layer, and the multilayer antireflection film has the antireflection effect for s-polarized light of a specific wavelength of not more than 250 nm incident to the low-refractive-index layer.
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