Rotating susceptor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 15, 2003
Grant Date -
Feb 13, 2003
app pub date -
Aug 9, 2001
filing date -
Aug 9, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A semiconductor processing reactor includes a rotating susceptor having at least one substrate holder for supporting a substrate during processing. A susceptor motor is coupled to the rotating susceptor and a substrate holder motor is coupled to the substrate holder. The susceptor motor controls the rotation of the rotating susceptor and the substrate holder motor controls the rotation of the substrate holder. This allows the rotating susceptor to be rotated independent of the rotation of the substrate holder. Further, the substrate holder lifts the substrate above the rotating susceptor allowing automated loading and unloading of the substrate.
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