Antistatic optical pellicle
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United States of America Patent
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Jul 15, 2003
Grant Date -
Dec 5, 2002
app pub date -
May 30, 2001
filing date -
May 30, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
An antistatic pellicle for use with deep-ultraviolet light. The pellicle is coated with a thin metal oxide layer that has high transmissivity for deep-ultraviolet light and an electrical resistivity low enough to minimize electrostatic discharge. The metal oxide layer may be produced by a sol-gel process using a reactive polyvalent metal sol-precursor. The sol-precursor is converted to a sol, the sol is applied to a membrane so that it produces a gel on a surface of the membrane, and then the gel is dried to a coating.
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