Plant for processing wafers
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United States of America Patent
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-
Jul 15, 2003
Grant Date -
Oct 31, 2002
app pub date -
Apr 29, 2002
filing date -
Oct 29, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A plant for processing wafers, having a plurality of fabrication units, a plurality of measuring units, and a transport system for transporting the wafers. The fabrication units and the measuring units are each assigned a registration system. The feeding-in and discharge of the wafers to and from the respective fabrication unit or measuring unit can be registered in order to determine the wafer occupancy in the unit. Depending on this occupancy, a supply request or disposal request can be generated for the respective fabrication unit and measuring unit.
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