Micromachined membrane particle filter using parylene reinforcement

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United States of America Patent

PATENT NO 6598750
SERIAL NO

09741968

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Abstract

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A micromachined membrane particle filter is formed by making holes in a silicon and coating over the holes with Parylene.

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Patent Owner(s)

Patent OwnerAddress
CALIFORNIA INSTITUTE OF TECHNOLOGY1200 E CALIFORNIA BOULEVARD M/C 6-32 PASADENA CA 91125

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tai, Yu-Chong Pasadena, CA 251 6248
Yang, Xing Pasadena, CA 189 1127

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