Method for treating waste gas containing fluorochemical

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United States of America Patent

PATENT NO 6602480
SERIAL NO

09763126

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Abstract

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A method for decomposing a fluorine-containing compound by contacting an exhaust gas 1 containing a fluorine-containing compound, such as C.sub.2 F.sub.6, with aluminum oxide 3, such as .gamma.-alumina, which has been heated to a high temperature of, for example, 800.degree. C. to 900.degree. C. There may be such a necessary or larger number of moles of H.sub.2 that the fluorine atoms in the fluorine-containing compound become HF. The method has a high decomposition rate of a fluorine-containing compound, a long life, and involves minimal occurrence of CO.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATIONOTA-KU TOKYO 144-8510

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mori, Yoichi Kanagawa, JP 33 281

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