Device for cleaning an article

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United States of America Patent

PATENT NO 6602542
SERIAL NO

10045770

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The surface of an article with a metallic base body is cleaned. A plasma comprising electrically positively charged ions is generated, and the ions are accelerated toward the article, so that they come into contact with the base body for cleaning purposes. To do this, an electron beam is directed onto the base body. The outgoing flux of electrons which come into contact with the base body is controlled by the base body being connected to a reference potential via a switch of at a fixed, adjustable or regulated frequency.

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Patent Owner(s)

  • GENETICS INSTITUTE, INC.;SIEMENS AKTIENGESELLSCHAFT

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dopper, Gebhard Aachen, DE 4 48

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