Glass sheet with conductive film, method of manufacturing the same, and photoelectric conversion device using the same
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United States of America Patent
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Aug 5, 2003
Grant Date -
N/A
app pub date -
May 18, 2000
filing date -
May 18, 1999
priority date (Note) -
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Abstract
On a glass sheet, an undercoating layer and a conductive film containing tin oxide as a main component are formed suitably in this order. On the conductive film, a photoelectric conversion unit and a back electrode are formed, thus obtaining a thin film photoelectric conversion device. In the present invention, the absorption coefficient of this conductive film is decreased up to 1.2.times.10.sup.3 cm.sup.-1 or less. In another embodiment of the present invention, the chlorine concentration in a conductive film is set to be 0.11 wt. % or lower and the fluorine concentration in the conductive film is equal to or higher than the chlorine concentration. In still another embodiment, in a wavelength of 550 nm, a conductive film is formed so that a glass sheet with a conductive film has a transmittance of at least 79% and a haze ratio of at least 4%.
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