Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses
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United States of America Patent
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Aug 5, 2003
Grant Date -
N/A
app pub date -
Apr 17, 2000
filing date -
Apr 19, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing.
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