Acoustic mirror materials for acoustic devices
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United States of America Patent
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Aug 5, 2003
Grant Date -
N/A
app pub date -
May 23, 2000
filing date -
May 23, 2000
priority date (Note) -
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Abstract
A reflector stack or acoustic mirror arrangement for an acoustic device is described which may attain the highest possible impedance mismatch between alternating higher and lower impedance reflecting layers of the stack, so as to maximize bandwidth. The arrangement may also reduce manufacturing costs by requiring fewer layers for the device, as compared to conventional acoustic mirrors. The thinner reflecting stack is accordingly fabricated in reduced time to lower cost, by incorporating materials providing a larger acoustic impedance mismatch than those currently obtainable. The bandwidth of the resulting acoustic resonator device may be widened, particularly when a low density material such as aerogel, CVD SiO.sub.2 and/or sputter deposited SiO.sub.2 is applied as topmost layer in the reflector stack/acoustic mirror arrangement of the device.
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