Vaporizer
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United States of America Patent
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Aug 12, 2003
Grant Date -
Sep 5, 2002
app pub date -
Feb 28, 2002
filing date -
Feb 28, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
A vaporizer is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exchanger having cross-slots intersecting a plurality of seamless slots to reduce unvaporized liquid from exiting the vaporizer.
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