Coating film forming apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 12, 2003
Grant Date -
Jun 21, 2001
app pub date -
Dec 14, 2000
filing date -
Dec 17, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus includes a holding portion for holding a substrate, a nozzle, provided to face the substrate held by the holding portion, for discharging a solution to the substrate, a driver for moving the nozzle along a surface of the substrate relatively with respect to the substrate while the solution is being discharged to the surface of the substrate from the nozzle, a mask unit covering a portion other than a film formation area of the substrate and including a mask member for catching the solution from the nozzle, and a cleaner provided in the mask unit. The coating solution can be supplied to the surface of the substrate in a way similar to a picture drawn with a single stroke of a brush. A cleaning unit for cleaning the mask member does not need to be provided separately, leading to the facilitation of cleaning and a reduction in space.
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