Process for producing an integrated semiconductor memory configuration
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United States of America Patent
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Aug 12, 2003
Grant Date -
Nov 8, 2001
app pub date -
Jun 15, 2001
filing date -
Sep 30, 1996
priority date (Note) -
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Abstract
A process for producing an integrated semiconductor memory configuration, in particular one suited to the use of ferroelectric materials as storage dielectrics, in which a conductive connection between one electrode of a storage capacitor and a selection transistor is not produced until after the storage dielectric has been deposited; and a semiconductor memory configuration produced using the production process.
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