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Abstract

The present invention provides an analog frequency divider structure that receives an input signal at a selected frequency and generates an output signal at a fraction, e.g. one-half, of the input frequency. In one embodiment, the analog frequency divider structure is implemented as a MEMS device having a vibratory beam extending along a longitudinal axis between two fixed ends and a piezoelectric transducer coupled to the beam. The MEMS structure further includes a conductive layer disposed on at least a portion of the vibratory beam, which is capacitively coupled to a conductive electrode. A longitudinal excitation of the piezoelectric transducer can effect application of a periodic longitudinal deformation force to the vibratory beam. This deformation force causes the beam to vibrate in a transverse direction at its natural transverse vibrational frequency, which is selected to be a fraction of the input frequency. The conductive electrode capacitively couples to this transverse vibration to generate an output electrical signal at the transverse vibrational frequency.

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First Claim