Method and apparatus for measuring characteristic of specimen and its application to high frequency response measurement with scanning probe microscopes
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United States of America Patent
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Aug 12, 2003
Grant Date -
Nov 8, 2001
app pub date -
Mar 20, 2001
filing date -
Mar 23, 2000
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus for measuring a characteristic of a specimen, includes a probe for scanning a surface of the specimen in a noncontacting state, a vibrating unit for vibrating the probe, an excitation field generating unit for generating an amplitude modulation signal which is amplitude-modulated with a modulation frequency and a carrier frequency and producing an excitation field at the surface of the specimen on the basis of the generated amplitude modulation signal, and a measuring unit for measuring a force interaction between the probe and the specimen caused by the excitation field generated at the surface of the specimen.
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