Method for manufacturing piezoelectric oscillator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 19, 2003
Grant Date -
N/A
app pub date -
Jan 28, 2000
filing date -
Jan 29, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method is provided for fabricating a piezoelectric vibrator without degrading vibration characteristics. The piezoelectric vibrator has a vibration plate formed with a piezoelectric vibration portion and a frame portion integrally connected with a base portion of the piezoelectric vibration portion and surrounding the piezoelectric vibration portion. Opposite surfaces of the piezoelectric vibration plate are provided with a pair of lid members bonded to hermetically seal the piezoelectric vibration portion without interfering with vibration thereof. To achieve the bonding, a metal film is coated over substantially the entire area of opposite surfaces of the piezoelectric vibration plate. The metal film is patterned to form oscillation electrode films on opposite surfaces of the piezoelectric vibration portion and to form bonding films on opposite surfaces of the frame portion for bonding the frame portion to the pair of lid members.
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