Method and apparatus for treating substrates
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Aug 19, 2003
Grant Date -
N/A
app pub date -
Jun 30, 2000
filing date -
Dec 31, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and apparatus for treating substrates in a fluid container with at least one fluid and ultrasound provided. Each of two oppositely disposed walls of the fluid container are provided with at least two ultrasound radiation areas that can be respectively individually activated. The ultrasound radiation areas of one of the container walls is activated in a chronological relationship to the ultrasound radiation areas of the other container wall in such a way that oppositely disposed ultrasound radiation areas of the container walls are not activated simultaneously.
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