Proximity micro-electro-mechanical system
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United States of America Patent
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Aug 19, 2003
Grant Date -
Aug 7, 2003
app pub date -
Feb 5, 2002
filing date -
Feb 5, 2002
priority date (Note) -
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Abstract
A proximity micro-electro-mechanical system (MEMS) utilizing a gaseous capacitive gap between two conductive members. The gaseous gap is maintained by insulating structures that prevent the two conductive members from shorting. Once actuated, the gaseous gap allows high-frequency signals to be transmitted between the two conductive members.
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