Single point high resolution time resolved photoemission microscopy system and method
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United States of America Patent
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Aug 19, 2003
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app pub date -
Dec 4, 1998
filing date -
Dec 4, 1998
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Abstract
A method and system providing single point high spatial and timing resolution for photoemission microscopy of an integrated circuit. A microscope having an objective lens forming a focal plane is arranged to view the integrated circuit, and an aperture element having an aperture is optically aligned in the back focal plane of the microscope. The aperture element is positioned for viewing a selected area of the integrated circuit. A photo-diode optically aligned with the aperture to detect photoemissions when test signals are applied to the integrated circuit.
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