Method and structure for crystallizing a film

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United States of America Patent

PATENT NO 6610998
SERIAL NO

09577823

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Abstract

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A method and structure for crystallizing film is disclosed. The method includes the steps of forming a film on a substrate, forming a lens on the film to focus an electromagnetic wave on the film and directing the electromagnetic wave on the film inclusive of the lens to crystallize the film.

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Patent Owner(s)

Patent OwnerAddress
GOLDSTAR ELECTRON CO LTD50 HYANGJUNG-DONG CHEONGJU CHOONGCHUNGBOOK-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Park, Min Hwa Chungcheongbuk-do, KR 4 9

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