Vertically oriented nano-fuse and nano-resistor circuit elements
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United States of America Patent
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Aug 26, 2003
Grant Date -
Apr 3, 2003
app pub date -
Sep 28, 2001
filing date -
Sep 28, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Vertically oriented nano-circuits including fuses and resistors allow for significant densities to be achieved. The vertically oriented nano-circuits can be fabricated using standard known processes such as Damascene, wet etching, reactive etching, etc. Thus little additional capital expenditure is required other than to acquire present state-of-the-art equipment. Devices using these vertically oriented nano-circuits are also inexpensive to manufacture.
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