Charged particle beam column
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United States of America Patent
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Sep 2, 2003
Grant Date -
N/A
app pub date -
Apr 15, 1999
filing date -
Apr 15, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
A column for directing a beam of charged particles with a finite energy spread onto a specimen surface under an oblique beam landing angle comprises: a particle source; an objective lens; a deflection unit for deflecting the beam of charged particles away from the optical axis such that the beam.of charged particles traverses the objective lens off-axis, thereby causing a chromatic aberration, a compensation unit adapted to disperse the beam of charged particles, thereby substantially compensating said chromatic aberration in the plane of the specimen surface, whereby the combined action of the objective lens and the deflection unit directs the beam of charged particles to hit the specimen surface under said large beam landing angle.
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