Substrate transfer system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Sep 2, 2003
Grant Date -
Aug 9, 2001
app pub date -
Dec 21, 2000
filing date -
Feb 7, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A substrate transfer system comprises plural end-effectors that are placed so as to touch a periphery of a cone having a vertical angle at a 2.theta. angle with respect to a central axis at an arbitrary .theta. angle to a horizontal plane, wherein substrates are interchanged and simultaneously transferred where the end-effectors are in a horizontal position. Besides, since the end-effectors are vertically located, the minimum rotational radius of the system that is projected to a horizontal plane, can be reduced. This contributes toward the reduction of an installation area for a substrate processing equipment in which the substrate transfer system is equipped.
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