Methods and apparatus for providing a multi-stop micromirror
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United States of America Patent
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Sep 2, 2003
Grant Date -
Jan 9, 2003
app pub date -
Jul 3, 2001
filing date -
Jul 3, 2001
priority date (Note) -
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Abstract
A microstructure is provided which facilitates alignment by allowing movement of the microstructure between one of a plurality of positions. The microstructure is included in an electromechanical machine which comprises a base layer, an actuator and two or more structural plates. One of the structural plates can be deflected to select a movement limit for the other structural plate. Methods for configuring the structural plates relative to each other to facilitate alignment are also provided.
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