Wafer boat
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 9, 2003
Grant Date -
Mar 20, 2003
app pub date -
Sep 18, 2001
filing date -
Sep 18, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A frame of a wafer boat is retrofitted with brace assemblies. The frame has left and right vertically extending, horizontally spaced supports. Each support has a plurality of slots above one another. A plurality of substantially horizontal wafers are horizontally insertable above one another with respective left edges of the wafers in respective ones of the slots of the left support and respective right edges of the wafers in respective ones of the slots of the right support. Each brace assembly includes a plurality of braces. Each brace has a respective upper surface in a respective position to support a lower surface of a respective wafer between and distant from the slots in which the left and right edges of the wafer are inserted.
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Cited Art Landscape
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