Treatment solution supply apparatus and treatment solution supply method
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United States of America Patent
Stats
-
Sep 9, 2003
Grant Date -
Apr 18, 2002
app pub date -
Oct 10, 2001
filing date -
Oct 13, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A treatment solution supply apparatus according to the present invention is a treatment solution supply apparatus for supplying a treatment solution onto a substrate which is disposed in a predetermined processing position on a mounting portion, comprising a treatment solution supply nozzle for supplying the treatment solution onto the substrate and a nozzle holder for releasably holding the treatment solution supply nozzle. The treatment solution supply nozzle is disposed in a predetermined stand-by position and the nozzle holder is movable in three dimensions. The movability of the nozzle holder in three dimensions makes it possible to finely adjust the position of the treatment solution supply nozzle and thereby, supply the treatment solution accurately to an appropriate position on the substrate.
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