Integration of ferromagnetic films with ultrathin insulating film using atomic layer deposition

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Sep 9, 2003
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Oct 10, 2001
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Oct 11, 2000

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A technique to form an ultrathin dielectric layer over a ferromagnetic layer by atomic layer deposition.

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AIXTRON INC	1139 KARLSTAD DRIVE SUNNYVALE CA 94089

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Sneh, Ofer	Broomfield, CO	49	7278

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Integration of ferromagnetic films with ultrathin insulating film using atomic layer deposition

Number of patents in Portfolio can not be more than 2000

United States of America Patent

09974076

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PATENT NO	6617173
SERIAL NO	09974076
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