Apparatus and method of protecting a probe card during a sort sequence
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United States of America Patent
Stats
-
Sep 9, 2003
Grant Date -
N/A
app pub date -
Aug 2, 2001
filing date -
Aug 2, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus and method for protecting a probe card during a sort sequence are provided. With the apparatus and method, one or more probe card protectors are attached to a probe card. When the wafer is driven toward the probe card, if an amount of overdriving of the probe card occurs, the probe card protectors come into contact with the wafer. By pressing against the wafer, the probe card protectors generate a force that causes a driver motor of the driving mechanism to stall, thereby avoiding any further overdrive of the probe card and avoiding damage to the probe card.
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