Drive feedthrough nulling system
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United States of America Patent
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Sep 16, 2003
Grant Date -
Jan 9, 2003
app pub date -
Aug 30, 2002
filing date -
Aug 2, 2000
priority date (Note) -
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Abstract
The present invention relates to a method for nulling drive feedthrough error in a sensor having first and second drive electrodes which impart vibratory motion to first and second proof masses in response to first and second opposite phase drive signals, and having first and second capacitances defined between the drive electrodes and their associated proof masses. A mismatch between the first and the second capacitance is measured. Drive feedthrough caused by the measured capacitance mismatch is nulled by adjusting the relative amplitudes of the first and second opposite phase drive signals, whereby the ratio of the amplitudes is proportional to the ratio of the first and second capacitances. A servo loop may adaptively effect the ratio of amplitudes.
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