Developer producing equipment and method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6623183
APP PUB NO 20020146251A1
SERIAL NO

10068809

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The developer producing equipment of the present invention is connected via piping to working equipment in which electronic circuits, on which fine working is performed, are formed, and produces an alkali type developer used in the abovementioned working equipment. This developer producing equipment comprises a preparation tank to which a developer stock solution and pure water are supplied, and in which these are agitated, first liquid amount measuring means for measuring the amount of the alkali type developer inside the preparation tank, first alkali concentration measuring means for measuring the alkali concentration of the abovementioned alkali type developer, first liquid amount control means for adjusting the amount of the alkali type developer inside the preparation tank on the basis of the measured value obtained by the abovementioned first liquid amount measuring means the abovementioned first alkali concentration measuring means, and liquid supply control means.

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Patent Owner(s)

Patent OwnerAddress
NAGASE & CO LTDOSAKA 550-8668
NAGASE CMS TECHNOLOGY CO LTDNAKAHARA-KU KAWASAKI-SHI 5-1 NIHONBASHI-KOBUNACHO CHUO-KU TOKYO 103-8355
HIRAMA LABORATORIES CO LTDKANAGAWA JAPAN KANAGAWA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hozan, Takahiro Tatsuno, JP 3 32
Kikukawa, Makoto Yokohama, JP 10 61
Morita, Satoru Tokyo, JP 15 119
Nakagawa, Toshimoto Kawasaki, JP 11 84
Ogawa, Shu Tokyo, JP 17 125

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