Lead zirconate titanate dielectric thin film composites on metallic foils
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United States of America Patent
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Sep 23, 2003
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N/A
app pub date -
Mar 4, 2000
filing date -
Mar 4, 2000
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Expired
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Abstract
Crystalline dielectric lead zirconate titanate thin film composites on metallic foils exhibit high dielectric constants, low dielectric loss (loss tangent of less than 5%) and low leakage current. The lead zirconate titanates may be of the formula PbZr.sub.x Ti.sub.y O.sub.z (PZT) wherein x and y are independently from about 0.35 to about 0.65 and z is from about 2.5 to about 5.0. The thin foil dielectric composites can be prepared by a variety of methods including deposition of PZT thin films on brass, platinum, titanium, and stainless steel foils using sol-gel processing, sputtering deposition and chemical vapor deposition.
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