Method for calibrating optical-based metrology tools
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United States of America Patent
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Sep 23, 2003
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Sep 26, 2002
filing date -
Sep 26, 2002
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Abstract
The present invention is generally directed to various methods for calibrating optical-based metrology tools. In one illustrative embodiment, the method comprises performing a metrology process on a specimen using an optical-based metrology tool to obtain optical characteristic data and comparing the obtained optical characteristic data to target optical characteristic data established for the specimen.
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