Particle source for producing excited particles
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United States of America Patent
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Sep 23, 2003
Grant Date -
Jul 4, 2002
app pub date -
Sep 24, 2001
filing date -
Sep 24, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a particle source, particularly an ion source for the production of excited particles in gaseous media. A dielectric, e.g., Kapton foil, is coated electrically conductively on both sides, and a voltage, preferably pulsed, is applied between the two coatings. A gas discharge is ignited in the gas through-flow by the voltage. Due to a pressure difference between the two sides of the foil, the gas expands from the high pressure side to the low pressure side, preferably in an ultrasonic expansion, whereby a directed, cold beam of excited particles or ions is produced.
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