Interferometric-based external measurement system and method
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United States of America Patent
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Sep 23, 2003
Grant Date -
Apr 24, 2003
app pub date -
Oct 12, 2001
filing date -
Oct 12, 2001
priority date (Note) -
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Abstract
An interferometric-based measurement system for externally measuring a distance between a pair of reference surfaces on an object, including: a low coherence light interferometer; an object mounting apparatus including an optical probe having an optical probe chuck; an optical fiber cable for coupling light from the interferometer to the optical probe chuck; and a computer for processing data collected by the interferometer, wherein the data is used to determine the distance between the pair of reference surfaces on the object.
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