Method of making a thermal bend actuator
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United States of America Patent
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-
Sep 30, 2003
Grant Date -
Apr 18, 2002
app pub date -
Aug 31, 2001
filing date -
May 4, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of forming a thermal bend actuator (6) is provided with upper arms (23, 25, 26) and lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26, 27, 28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material.
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