Electrically decoupled silicon gyroscope
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United States of America Patent
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Sep 30, 2003
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N/A
app pub date -
Sep 13, 2000
filing date -
Sep 17, 1999
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Abstract
An oscillatory gyroscope is described with decoupled drive and sense oscillators and reduced cross-axis sensitivity. The gyroscope is fabricated using a plasma micromachining process on standard silicon wafers. The electrical isolation of the drive and sense functions of the gyroscope, contained within the same micromechanical element, reduce cross-coupling while obtaining high inertial mass and high sensitivity.
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