Wet treatment apparatus
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United States of America Patent
Stats
-
Oct 7, 2003
Grant Date -
Feb 28, 2002
app pub date -
Aug 30, 2001
filing date -
Aug 30, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A wet treatment apparatus includes a nozzle having an approximately rectangular introduction opening surface that is open toward a substrate to be treated and an approximately rectangular recovery opening surface that is open toward the substrate, these opening surfaces being flush with each other and disposed with the long side directions thereof in parallel with each other. A treatment liquid is introduced between the introduction opening surface and the surface to be treated of the substrate and is sucked and recovered from between the recovery opening surface and the surface to be treated of the substrate. The flow rate of the treatment liquid flowing from the introduction opening surface to the recovery opening surface through the surface to be treated of the substrate is controlled to 0.02 to 0.3 L/min per 1 cm in the long side direction of the introduction opening surface. With this arrangement, there can be provided a wet treatment apparatus capable of using a liquid saving type nozzle under optimum conditions.
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