Stereolithographic method and apparatus for fabricating spacers for semiconductor devices and resulting structures

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United States of America Patent

PATENT NO 6630365
SERIAL NO

10266464

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Spacers for use on a surface of a semiconductor device component may be fabricated from dielectric materials. For example, stereolithographic or other processes in which a plurality of layers are formed that are contiguous, at least partially superimposed relative to one another, and mutually adhered. These processes may include use of a machine vision system for recognition of the position and orientation of a semiconductor device component upon disposal or fabrication of one or more spacers thereon. One or more of the insulative spacers may be formed or disposed on the surface of a semiconductor device component prior to securing the semiconductor device component to a higher level component, such as a carrier substrate. The spacers may define a minimum, substantially uniform distance between the semiconductor device components. The spacers may also prevent tilting or tipping of one of the semiconductor device components relative to the other.

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Patent Owner(s)

Patent OwnerAddress
U S BANK NATIONAL ASSOCIATION AS COLLATERAL AGENT633 WEST FIFTH STREET 24TH FLOOR LOS ANGELES CA 90071

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Farnworth, Warren M Nampa, ID 855 33798
Wood, Alan G Boise, ID 415 23368

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