Array substrate inspection method with varying non-selection signal
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United States of America Patent
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-
Oct 7, 2003
Grant Date -
Dec 20, 2001
app pub date -
May 22, 2001
filing date -
May 24, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Each of analogue switches (ASW1 to ASWn) enters a non-conductive state (namely, Off state) by using two kinds of off-voltages Vbs which are different voltages. In this state, a test signal stored in a supplemental capacity (13) is kept during a desired time period and then red it. The waveforms of the two test signals corresponding to the two kinds of the off-voltages Vbs are compared to each other. By using the comparison result, it is possible to detect a presence of off-leak defect in an array substrate fabrication process and to easily distinguish the off-leak defect from other types of defects.
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