Thin film battery and method of manufacture

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United States of America Patent

PATENT NO 6632563
SERIAL NO

09656012

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Abstract

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A thin film battery 10 comprises a substrate 12 which permits the battery 10 to be fabricated to provide higher energy density. In one embodiment, the substrate 12 of the battery 10 comprises mica. A crystalline lithium metal oxide film may be used as the cathode film 18.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Krasnov, Victor Tarzana, CA 21 897
Nieh, Kai-Wei Monrovia, CA 24 1048
Ting, Su-Jen Encino, CA 8 404

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