Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
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United States of America Patent
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Oct 14, 2003
Grant Date -
Feb 13, 2003
app pub date -
Aug 7, 2001
filing date -
Aug 7, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microelectromechanical device (MEMD) defined within a substrate of a MEMS includes a mass element defining an area of interest. The device also includes a support beam supporting the mass element in spaced-apart relationship from the substrate. The support beam includes a first beam member defined by a first fixed end connected to the substrate, and a first free end connected to the mass element. The support beam further includes a second beam member defined by a second fixed end connected to the substrate, and a second free end connected to the mass element. The beam members are in spaced-apart relationship from one another. A first cross member connects the first beam member and the second beam member. Preferably, the support beam includes a plurality of cross members. Two such support beams can be used to support a mass element in a MEMD in a bridge configuration.
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