Permeable protective coating for a single-chip hydrogen sensor
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United States of America Patent
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Oct 21, 2003
Grant Date -
N/A
app pub date -
Feb 20, 2001
filing date -
Feb 18, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A permeable protective coating for a single-ship hydrogen sensor. A hydrogen-permeable coating is applied to a semiconductor wafer containing hydrogen sensor dies, prior to dicing of the wafer. The permeable coating is preferably an organic spin-on polymer, and the hydrogen sensors preferably include hydrogen-sensing elements composed of a palladium nickel alloy.
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