On-chip capacitor
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United States of America Patent
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-
Oct 21, 2003
Grant Date -
Feb 28, 2002
app pub date -
Aug 23, 2001
filing date -
Aug 31, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An on-chip analog capacitor. Metal interconnect structures are used to form the capacitor, and the interdigitated fingers of like polarity within the interconnect structure are connected above and below to one another by metal vias to form a wall of metal which increases total capacitance by taking advantage of the via sidewall capacitance.
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