High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications
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United States of America Patent
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Oct 21, 2003
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N/A
app pub date -
Aug 17, 2000
filing date -
Aug 17, 2000
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Abstract
A Micro Electro-Mechanical System (MEMS) varactor (100, 200) having a bottom electrode (116) formed over a substrate (112) and a dielectric material (130) disposed over the bottom electrode (116). A pull-down electrode (122) is formed over spacer (120) and the dielectric material (130). The MEMS varactor (100, 200) is adapted to operate in a stiction mode, with at least a portion of pull-down electrode (122) in contact with dielectric material (130). The MEMS varactor (100, 200) has a high Q, large tuning range, and high sensitivity.
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