Multiple beam inspection apparatus and method
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United States of America Patent
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Oct 21, 2003
Grant Date -
N/A
app pub date -
Aug 10, 2000
filing date -
Aug 10, 2000
priority date (Note) -
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Abstract
Disclosed is an optical inspection system for inspecting the surface of a substrate. The inspection system includes a light source for emitting a light beam along an optical axis and a first set of optical elements arranged for separating the light beam into a plurality of light beams, directing the plurality of light beams to intersection with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system also includes a second set of optical elements adapted for collecting a plurality of transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate and a light detector arrangement including individual light detectors that each receive individual ones of the plurality of transmitted light beams. The light detectors are arranged for sensing the light intensity of the transmitted light beams.
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