Deposited film forming apparatus and deposited film forming method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Oct 28, 2003
Grant Date -
Oct 18, 2001
app pub date -
Jan 31, 2001
filing date -
Jan 31, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A deposited film forming apparatus has a vacuum chamber containing a power applying electrode spaced above a grounded flat plate base member. The power applying electrode is fixed to the base member with a plurality of electrically insulating fastening members, at positions effective to suppress deformation of the power applying electrode, wherein an electrically insulating spacer is placed between the power supplying electrode and the base member to electrically insulate said power applying electrode from the base member.
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