Apparatus and method for coating substrates with vacuum depositable materials
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United States of America Patent
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Oct 28, 2003
Grant Date -
Mar 7, 2002
app pub date -
Jun 25, 2001
filing date -
Jun 26, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for coating a substrate with a diamond like coating or other vacuum depositable material comprises a chamber 11 having, or acting as, an anode, means for supporting a substrate 15 in the chamber, means for establishing a low pressure atmosphere containing a hydrocarbon-based gas in the chamber, and a radio frequency source 12 for establishing a gas plasma in the chamber, the substrate 15 acting as a cathode.
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