Method for producing surface acoustic wave sensors and such a surface acoustic wave sensor
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United States of America Patent
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-
Nov 4, 2003
Grant Date -
Aug 22, 2002
app pub date -
Apr 1, 2002
filing date -
Oct 15, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a method for producing surface wave sensors on the basis of a surface wave building component a polymer parylene film with a thickness of 20 to 200 nm is applied to a hydrophilic sensor surface of the surface wave building component by deposition from the gas phase, whereby the hydrophilic sensor surface becomes hydrophobic, the surface is then subjected to plasma activation to render it hydrophilic and a hydrophilic sorption polymer layer is then applied to the parylene film so as to provide a surface wave sensor with a homogenous sorption polymer layer.
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