Delivery of liquid precursors to semiconductor processing reactors
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United States of America Patent
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Nov 4, 2003
Grant Date -
N/A
app pub date -
Sep 21, 2000
filing date -
Sep 25, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
This invention relates to methods and apparatus for delivering liquid precursors to semi-conductor processing apparatus. The liquid precursor delivery system is generally indicated at (10) and includes a source (11), an inlet tube (12), a two-way valve (13), a pump assembly (14), an outlet tube (15), a shut-off valve (16) and a flash evaporator (17). The pump assembly (14) is in the form of a syringe or variable volume pump and is controlled by a combination of a step motor (27) and a linear encoder (30). The arrangement is such that unused liquid precursor can be returned to the source.
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